FRONICS
MicroLED Patents

MicroLED Patents

Title Layout structure between substrate, micro LED array and micro vacuum module for micro LED array transfer and method for transfering micro LED

Application No. 1020200007545

발명의명칭: 마이크로 LED 어레이 전사를 위하여 기판, 마이크로 LED 어레이, 마이크로 진공모듈 간의 배치 구조 및 마이크로 진공모듈을 이용한 마이크로 LED 어레이 전사 방법(Layout structure between substrate, micro LED array and micro vacuum module for micro LED array transfer and method for transfering micro LED)
Int. CI: H01L 21/52 (2006.01.01) H01L 21/67 (2006.01.01) H01L 21/677 (2006.01.01) H01L 21/683 (2006.01.01) H01L 21/68 (2006.01.01)
출원번호(일자): 1020200007545 (2020.01.20)

 

 

 

마이크로 LED 어레이 전사를 위하여 기판, 마이크로 LED 어레이, 마이크로 진공모듈 간의 배치 구조 및 마이크로 진공모듈을 이용한 마이크로 LED 어레이 전사 방법

 

 

According to the present invention, there is provided a method for transferring a micro LED array using a micro vacuum module, the method comprising: peeling the micro LED array from a mother substrate or a temporary substrate; aligning the exfoliated micro LED array on the target substrate to which the conductive transfer member is applied and then releasing; Conducting all of the micro LED arrays having the same color or different colors by performing the peeling, aligning, and releasing processes of the micro LED array on the same color or different color micro LED arrays formed on a different mother substrate or temporary substrate than before transferring the transfer member to a desired position on the target substrate coated thereon; The step of electrically interconnecting the target substrate and the micro LED array aligned on the target substrate by physical contact; including, aligning the exfoliated micro LED array on the target substrate to which the transfer member is applied , in a state where the laser alignment module is positioned between the micro-vacuum module and the target substrate, alignment is performed through a plurality of laser recognition coordinates respectively set on the micro-vacuum module and the target substrate by using the laser alignment module do it with

 

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