FRONICS
Voice Sensor Patents

Voice Sensor Patents

Title Flexible piezoelectric acoustic sensor fabricated integrally with Si as the supporting substrate

Application No. 1020200080524

발명의명칭: 일체형으로 제작된 유연 압전 음성센서(Flexible piezoelectric acoustic sensor fabricated integrally with Si as the supporting substrate)
Int. CI: G01H 11/08 (2006.01.01)
출원번호(일자): 1020200080524 (2020.06.30)

 

일체형으로 제작된 유연 압전 음성센서

: A voice sensor comprising a piezoelectric material layer, the voice sensor comprising: a substrate; support layer; metal layer; a piezoelectric material layer on the metal layer and an electrode on the piezoelectric material layer, wherein the substrate integrally supports the element layer of the voice sensor in such a way as to expose a part of the thin film including the piezoelectric material layer, the electrode, and the polymer layer There is provided a voice sensor comprising a piezoelectric material layer, characterized in that.

 

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